Product Description of Phosphine CAS#7803-51-2
Phosphine (CAS#7803-51-2), with the chemical formula PH₃, is a highly toxic, flammable, and explosive gas. It is widely utilized in the semiconductor industry as a dopant source for material processing and is also applied in agriculture as a pesticide.
Due to its extreme toxicity and hazardous properties, phosphine requires strict handling and safety measures, as exposure to very low concentrations can pose serious health risks and may be fatal.
Key Specifications
Parameter | Electronic Grade | Industrial Grade |
Purity | ≥99.999% | ≥99.9% |
O₂ Content | ≤0.5 ppm | ≤50 ppm |
H₂O Content | ≤1 ppm | ≤10 ppm |
Total Impurities | ≤10 ppm | ≤1000 ppm |
1. Semiconductor Manufacturing
Used as a doping gas source for n-type silicon, providing precise doping control with a uniformity variance of ≤0.1%.
Applied in MOCVD (Metal Organic Chemical Vapor Deposition) processes for the production of GaN-based LEDs.
2. Grain Fumigation
Used as a grain fumigant, achieving up to 99.9% pest mortality at a dosage of 2 g/m³ according to OECD Guideline 633.
Provides a low-residue alternative to methyl bromide for pest control applications.
3. Chemical Synthesis
Utilized as a catalyst in asymmetric hydrogenation reactions, including the synthesis of chiral pharmaceutical intermediates.
